T/ICMTIA 4.2-2020
ArF photoresist monomer for integrated circuits Part 2: Solid methacrylate (English Version)

Standard No.

T/ICMTIA 4.2-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

Group Standards of the People's Republic of China

Latest

T/ICMTIA 4.2-2020

Scope

This document specifies the terms and definitions of argon fluoride photoresist monomers for integrated circuits Part 2 solid methacrylates, product types and structural characteristics, technical requirements, analysis and detection methods, process requirements, packaging, storage and transportation Wait for the request.

T/ICMTIA 4.2-2020 history

• 2020 T/ICMTIA 4.2-2020 ArF photoresist monomer for integrated circuits Part 2: Solid methacrylate