T/IAWBS 007-2018
Test method for thickness of 4H silicon carbide homo-epitaxial layers by infrared reflectance (English Version)

Standard No.
T/IAWBS 007-2018
Language
Chinese, Available in English version
Release Date
2018
Published By
Group Standards of the People's Republic of China
Latest
T/IAWBS 007-2018

T/IAWBS 007-2018 history

  • 2018 T/IAWBS 007-2018 Test method for thickness of 4H silicon carbide homo-epitaxial layers by infrared reflectance
Test method for thickness of 4H silicon carbide homo-epitaxial layers by infrared reflectance



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