DIN 32567-2:2014-10
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures

Standard No.

DIN 32567-2:2014-10

Release Date

2014

Published By

German Institute for Standardization

Latest

DIN 32567-2:2014-10

DIN 32567-2:2014-10 history

• 2014 DIN 32567-2:2014-10 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
• 2014 DIN 32567-2:2014 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
• 1970 DIN 32567-2 E:2012-07
• 0000 DIN 32567-2:2012