T/CNIA 0143-2022
Ultrapure Resin Vessels for Trace Impurity Analysis of Semiconductor Materials (English Version)

Standard No.

T/CNIA 0143-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0143-2022

Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and accompanying documents for ultrapure resin vessels (hereinafter referred to as vessels) for the analysis of trace impurities (ng/kg ~ μg/kg level) in semiconductor materials. and the contents of the order form.

T/CNIA 0143-2022 history

• 2022 T/CNIA 0143-2022 Ultrapure Resin Vessels for Trace Impurity Analysis of Semiconductor Materials