ISO 23420:2021
Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis

Standard No.

ISO 23420:2021

Release Date

2021

Published By

International Organization for Standardization (ISO)

Latest

ISO 23420:2021

Scope

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer. This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

ISO 23420:2021 history

• 2021 ISO 23420:2021 Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis