IEC 62880-1:2017 PDF

Scope: This part of IEC 62880 describes a constant temperature (isothermal) aging method for testing copper (Cu) metallization test structures on microelectronics wafers for susceptibility to stress-induced voiding (SIV). This method is to be conducted primarily at the wafer level of production during technology development@ and the results are to be used for lifetime prediction and failure analysis. Under some conditions@ the method can be applied to package-level testing. This method is not intended to check production lots for shipment@ because of the long test time. Dual damascene Cu metallization systems usually have liners@ such as tantalum (Ta) or tantalum nitride (TaN) on the bottom and sides of trenches etched into dielectric layers. Hence@ for structures in which a single via contacts a wide line below it@ a void under the via can cause an open circuit at almost the same time as any percentage resistance shift that would satisfy a failure criterion.

IEC 62880-1:2017 history

2017 IEC 62880-1:2017 Semiconductor devices - Stress migration test standard - Part 1: Copper stress migration test standard