YS/T 1164-2016
Determination of impurity content in high-purity quartz products for silicon materials by inductively coupled plasma optical emission spectrometry (English Version)

Standard No.

YS/T 1164-2016

Language

Chinese, Available in English version

Release Date

2016

Published By

工业和信息化部

Latest

YS/T 1164-2016

YS/T 1164-2016 history

• 2016 YS/T 1164-2016 Determination of impurity content in high-purity quartz products for silicon materials by inductively coupled plasma optical emission spectrometry