YS/T 1060-2015
Determination of other chlorosilanes in trichlorosilane for silicon epitaxy by gas chromatography (English Version)

Standard No.

YS/T 1060-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

工业和信息化部

Latest

YS/T 1060-2015

YS/T 1060-2015 history

• 2015 YS/T 1060-2015 Determination of other chlorosilanes in trichlorosilane for silicon epitaxy by gas chromatography