T/GVS 005-2022
Testing specification for contrast method of absolute pressure capacitance diaphragm vacuum gauge in the semiconductor equipment (English Version)

Standard No.

T/GVS 005-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/GVS 005-2022

Scope

Specifies the terms and definitions, symbols and abbreviations, general principles, test condition requirements, accuracy test, repeatability accuracy test, zero point, full-scale temperature coefficient test, data processing, Retest time. It is suitable for comparison testing of absolute voltage capacitance thin film vacuum gauges for semiconductor equipment with a measurement range of 0.01Pa to 100kPa.

T/GVS 005-2022 history

• 2022 T/GVS 005-2022 Testing specification for contrast method of absolute pressure capacitance diaphragm vacuum gauge in the semiconductor equipment