SEMI M3.8-1991
Standard for 150 mm sapphire substrates

Standard No.

SEMI M3.8-1991

Release Date

1991

Published By

Semiconductor Equipment and Materials International (SEMI)

Latest

SEMI M3.8-1991

SEMI M3.8-1991 history

• 1991 SEMI M3.8-1991 Standard for 150 mm sapphire substrates