SEMI M3.6-1988
Standard for 3 inch reclaimed sapphire substrates

Standard No.

SEMI M3.6-1988

Release Date

1988

Published By

Semiconductor Equipment and Materials International (SEMI)

Latest

SEMI M3.6-1988

SEMI M3.6-1988 history

• 1988 SEMI M3.6-1988 Standard for 3 inch reclaimed sapphire substrates