SEMI M3.5-1992
Standard for 100 mm sapphire substrates

Standard No.

SEMI M3.5-1992

Release Date

1992

Published By

Semiconductor Equipment and Materials International (SEMI)

Latest

SEMI M3.5-1992

SEMI M3.5-1992 history

• 1992 SEMI M3.5-1992 Standard for 100 mm sapphire substrates