SEMI M3.4-1991
Standard for 3 inch sapphire substrates

Standard No.

SEMI M3.4-1991

Release Date

1991

Published By

Semiconductor Equipment and Materials International (SEMI)

Latest

SEMI M3.4-1991

SEMI M3.4-1991 history

• 1991 SEMI M3.4-1991 Standard for 3 inch sapphire substrates