T/ICMTIA 3-2020
Hexachlorodisilane for integrated circuit (English Version)

Standard No.

T/ICMTIA 3-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

Group Standards of the People's Republic of China

Latest

T/ICMTIA 3-2020

Scope

This standard specifies the technical requirements, detection methods, packaging and transportation and safety requirements for hexachlorodisilane for integrated circuits. Among them, the detection methods cover sampling and judgment principles, determination of components and determination of impurity element content, etc.

T/ICMTIA 3-2020 history

• 2020 T/ICMTIA 3-2020 Hexachlorodisilane for integrated circuit