ASHRAE 4513-2002
Application of 3C Duct Design Method in Semiconductor Factory Process Exhaust Systems

Standard No.

ASHRAE 4513-2002

Release Date

2002

Published By

ASHRAE - American Society of Heating@ Refrigerating and Air-Conditioning Engineers@ Inc.

Latest

ASHRAE 4513-2002

ASHRAE 4513-2002 history

• 2002 ASHRAE 4513-2002 Application of 3C Duct Design Method in Semiconductor Factory Process Exhaust Systems