This document specifies a method for the dynamic preparation of hydrogen fluoride standard gas in sulfur hexafluoride gas using the principle of permeation. This document is applicable to the preparation of hydrogen fluoride standard gas in sulfur hexafluoride gas. The preparation of other component standard gases (H2S, SO2) in sulfur hexafluoride gas can refer to this method.
T/CEC 636-2022 history
2022T/CEC 636-2022 Preparation method of hydrogen fluoride standard gas in sulfur hexafluoride