T/CASAS 013-2021
Measuring method for testing the density of dislocation in SiC crystal Combined KOH etching and image recognition methods (English Version)

Standard No.
T/CASAS 013-2021
Language
Chinese, Available in English version
Release Date
2021
Published By
Group Standards of the People's Republic of China
Latest
T/CASAS 013-2021

T/CASAS 013-2021 history

  • 2021 T/CASAS 013-2021 Measuring method for testing the density of dislocation in SiC crystal Combined KOH etching and image recognition methods
Measuring method for testing the density of dislocation in SiC crystal  Combined KOH etching and image recognition methods



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