T/CIET 326-2023
Specifications for GW-level heterojunction cell panel PVD equipment (English Version)

Standard No.

T/CIET 326-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CIET 326-2023

Scope

This document specifies the terms and definitions, models and nomenclature, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of GW-level heterojunction cell panel PVD equipment. This document is applicable to GW-level heterojunction cell plate PVD equipment.

T/CIET 326-2023 history

• 2023 T/CIET 326-2023 Specifications for GW-level heterojunction cell panel PVD equipment