UNE-EN 62047-13:2012
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (Endorsed by AENOR in June of 2012.)
- Standard No.
- UNE-EN 62047-13:2012
- Release Date
- 2012
- Published By
- ES-UNE
- Latest
- UNE-EN 62047-13:2012
UNE-EN 62047-13:2012 history
- 2012 UNE-EN 62047-13:2012 Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures (Endorsed by AENOR in June of 2012.)
