KS I ISO 14644-12:2020
Cleanrooms and associated controlled environments —Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Standard No.

KS I ISO 14644-12:2020

Release Date

2020

Published By

Korean Agency for Technology and Standards (KATS)

Latest

KS I ISO 14644-12:2020

KS I ISO 14644-12:2020 history

• 2020 KS I ISO 14644-12:2020 Cleanrooms and associated controlled environments —Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration