This standard specifies the principles, methods, indicator system and requirements, procedures and reporting formats for green factory evaluation (hereinafter referred to as "evaluation") in the polysilicon manufacturing industry. This standard is applicable to the evaluation of factories that use the trichlorosilane method and the silane method to produce polycrystalline silicon products. Factories that use other processes to produce polycrystalline silicon products can be used as a reference.
T/CESA 1082-2020 history
2020T/CESA 1082-2020 Assessment requirements for green factory in polycrystalline silicon manufacturing industry