DIN EN 62047-6:2010-07
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010

Standard No.

DIN EN 62047-6:2010-07

Release Date

2010

Published By

German Institute for Standardization

Latest

DIN EN 62047-6:2010-07

DIN EN 62047-6:2010-07 history

• 2010 DIN EN 62047-6:2010-07 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010
• 2010 DIN EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009); German version EN 62047-6:2010