T/CNIA 0116-2021 Determination of impurity content in activated carbon for purification of tail gas from polysilicon production by inductively coupled plasma atomic emission spectrometry (English Version)
This document specifies the method for the determination of boron, phosphorus, aluminum, chromium, iron, nickel, copper, and zinc in activated carbon used for exhaust gas purification in polysilicon production by inductively coupled plasma atomic emission spectrometry. This document is applicable to the determination of boron, phosphorus, aluminum, chromium, iron, nickel, copper, and zinc content in activated carbon used for exhaust gas purification in polysilicon production.
T/CNIA 0116-2021 history
2021T/CNIA 0116-2021 Determination of impurity content in activated carbon for purification of tail gas from polysilicon production by inductively coupled plasma atomic emission spectrometry