This document specifies a method for the determination of trace anions (chloride, phosphate, sulfate) in high-purity nitric acid used in the electronics industry by ion chromatography. This document is suitable for the determination of trace anion content in high-purity nitric acid used in the electronics industry. Measuring range: 10.000μg/kg~500.000μg/kg.
T/CNIA 0119-2021 history
2021T/CNIA 0119-2021 Determination of trace anions in high-purity nitric acid for the electronics industry by ion chromatography