GB/T 42263-2022
Determination of nitrogen content in silicon single crystal—Secondary ion mass spectrometry method (English Version)

Standard No.

GB/T 42263-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 42263-2022

Scope

This document describes a secondary ion mass spectrometric method for the determination of nitrogen content in silicon single crystals. This document is applicable to the determination of nitrogen content in silicon single crystal with doping concentration of boron, antimony, arsenic and phosphorus less than 1×1020 cm-3 (0.2%).

GB/T 42263-2022 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions
• GB/T 22461 Surface chemical analysis.Vocabulary
• GB/T 32267 Terminology of performance testing for analytical instrument

GB/T 42263-2022 history

• 2022 GB/T 42263-2022 Determination of nitrogen content in silicon single crystal—Secondary ion mass spectrometry method