UNE-EN 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)

Standard No.

UNE-EN 62047-11:2013

Release Date

2013

Published By

ES-UNE

Latest

UNE-EN 62047-11:2013

UNE-EN 62047-11:2013 history

• 2013 UNE-EN 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)