KS D ISO 16413:2021
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Standard No.

KS D ISO 16413:2021

Release Date

2021

Published By

Korean Agency for Technology and Standards (KATS)

Latest

KS D ISO 16413:2021

KS D ISO 16413:2021 history

• 2021 KS D ISO 16413:2021 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting