T/ZZB 0648-2018
200 mm heavily phosphorus-doped single crystalline Czochralski silicon polished wafers (English Version)
- Standard No.
- T/ZZB 0648-2018
- Language
- Chinese, Available in English version
- Release Date
- 2018
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/ZZB 0648-2018
- Scope
- This standard specifies the terms and definitions, product classification, basic requirements, technical requirements, test methods, inspection rules, packaging, marking, transportation and storage, order form (or contract) of 200 mm heavily phosphorus-doped Czochralski single crystal polished wafers Content and quality commitment. This standard applies to silicon single crystal polished wafers with a diameter of 200 mm prepared by the Czochralski method using electronic grade polysilicon as the main raw material. The products are mainly used as substrates for epitaxial wafers for integrated circuits and discrete devices.
T/ZZB 0648-2018 history
- 2018 T/ZZB 0648-2018 200 mm heavily phosphorus-doped single crystalline Czochralski silicon polished wafers
