DIN EN 62047-12:2012-06
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011
- Standard No.
- DIN EN 62047-12:2012-06
- Release Date
- 2012
- Published By
- German Institute for Standardization
- Latest
- DIN EN 62047-12:2012-06
DIN EN 62047-12:2012-06 history
- 2012 DIN EN 62047-12:2012-06 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011
- 2012 DIN EN 62047-12:2012 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011
- 0000 DIN IEC 62047-12:2010
