KS I ISO 14644-15:2019
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

Standard No.

KS I ISO 14644-15:2019

Release Date

2019

Published By

Korean Agency for Technology and Standards (KATS)

Latest

KS I ISO 14644-15:2019

KS I ISO 14644-15:2019 history

• 2019 KS I ISO 14644-15:2019 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration