ISO 22415:2019
Surface chemical analysis — Secondary ion mass spectrometry — Method for determining yield volume in argon cluster sputter depth profiling of organic materials
- Standard No.
- ISO 22415:2019
- Release Date
- 2019
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 22415:2019
- Scope
- This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material. The method requires one or more test samples of the specified material as a thin, uniform film of known thickness between 50 and 1000 nanometres on a flat substrate which has a different chemical composition to the specified material. This document is applicable to test samples in which the specified material layer has homogeneous composition in depth and is not applicable if the depth distribution of compounds in the specified material is inhomogeneous. This document is applicable to instruments in which the sputtering ion beam irradiates the sample using a raster to ensure a constant ion dose over the analysis area.
ISO 22415:2019 Referenced Document
- ISO 18115-1:2013 Surface chemical analysis .Vocabulary.Part 1: General terms and terms used in spectroscopy
ISO 22415:2019 history
- 2019 ISO 22415:2019 Surface chemical analysis — Secondary ion mass spectrometry — Method for determining yield volume in argon cluster sputter depth profiling of organic materials
