This document stipulates the evaluation requirements for electronic grade chlorosilane green design product evaluation, the preparation method of product life cycle evaluation report, and the evaluation method and process. This document applies to green design products of electronic grade chlorosilanes (including electronic grade trichlorosilane, silicon tetrachloride, dichlorodihydrosilane, and hexachlorodisilane) produced by refining and purifying industrial chlorosilane products as raw materials. evaluation of.
T/CNIA 0103-2021 history
2021T/CNIA 0103-2021 Green design product evaluation technical specification for electronic grade chlorosilane