This document specifies the technical requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage and safety requirements for the mixed gas 4.5% hydrogen chloride/0.9% hydrogen/neon for integrated circuits. This document applies to the mixed gas 4.5% hydrogen chloride/0.9% hydrogen/neon for integrated circuits (hereinafter referred to as 4.5% hydrogen chloride/0.9% hydrogen/neon). Other component ratios of hydrogen chloride/hydrogen/neon mixtures can be implemented by reference.
T/CHBAS 33-2023 history
2023T/CHBAS 33-2023 Mixed gas for integrated circuits 4.5% hydrogen chloride/0.9% hydrogen/neon