GB/T 38446-2020
Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films (English Version)

Standard No.

GB/T 38446-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 38446-2020

Scope

This standard specifies the test method and data processing for the tensile properties of strip films. This standard is applicable to samples with a thickness between 50nm and several microns and a ratio of length to thickness greater than 300, and can also be used for quality monitoring of strip-shaped thin-film structures of MEMS products.

GB/T 38446-2020 Referenced Document

• GB/T 26111 Micro-Electro-Mechanical Systems (MEMS) Technical Terminology*， 2023-05-23 Update

GB/T 38446-2020 history

• 2020 GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films