T/CNIA 0141-2022
Determination of metal impurity content in hydrogen for polysilicon production by inductively coupled plasma mass spectrometry (English Version)

Standard No.

T/CNIA 0141-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0141-2022

Scope

This document specifies a method for determining the content of sodium, magnesium, aluminum, calcium, chromium, manganese, iron, nickel, copper, zinc, arsenic and titanium in hydrogen gas used for polycrystalline silicon production using inductively coupled plasma mass spectrometry (ICP-MS). .

T/CNIA 0141-2022 history

• 2022 T/CNIA 0141-2022 Determination of metal impurity content in hydrogen for polysilicon production by inductively coupled plasma mass spectrometry