BS EN ISO 23131:2022
Ellipsometry. Principles

Standard No.
BS EN ISO 23131:2022
Release Date
2023
Published By
British Standards Institution (BSI)
Status
Replace By
BS EN ISO 23131:2022(2023)
Latest
BS EN ISO 23131:2022(2023)
Scope
1   Scope This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98‑3.

BS EN ISO 23131:2022 history




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