BS EN ISO 23216:2022
Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Standard No.

BS EN ISO 23216:2022

Release Date

2023

Published By

British Standards Institution (BSI)

Latest

BS EN ISO 23216:2022

Scope

1   Scope This document specifies spectroscopic ellipsometry for the determination of optical properties ( refractive index n and extinction coefficient k ) and the optical classification of different types of amorphous carbon films within the n - k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

BS EN ISO 23216:2022 history

• 2023 BS EN ISO 23216:2022 Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry