T/ICMTIA ESG0024-2022
Mixed gas 1.2% helium/nitrogen for integrated circuits (English Version)

Standard No.
T/ICMTIA ESG0024-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/ICMTIA ESG0024-2022
Scope
This document specifies the technical requirements, inspection rules, test methods, marking, packaging, transportation and storage requirements for bottled 1.2% helium/nitrogen mixture. This document is applicable to 1.2% helium/nitrogen mixture for integrated circuits. Helium/nitrogen mixtures with other component proportions can be implemented as a reference.

T/ICMTIA ESG0024-2022 history




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