T/GVS 002-2021
Generic specification for high precision magnetron sputtering coating plant (English Version)

Standard No.

T/GVS 002-2021

Language

Chinese, Available in English version

Release Date

2021

Published By

Group Standards of the People's Republic of China

Latest

T/GVS 002-2021

Scope

Specifies the terms and definitions, composition, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of high-precision magnetron sputtering coating equipment. It is suitable for high-precision magnetron sputtering coating equipment (hereinafter referred to as "equipment") with ultimate pressure in the range of 10-5Pa ~ 10-3Pa.

T/GVS 002-2021 history

• 2021 T/GVS 002-2021 Generic specification for high precision magnetron sputtering coating plant