T/CNIA 0064-2020
Determination of impurity content in dust-free wipes for the polysilicon industry - Inductively coupled plasma atomic emission spectrometry (English Version)

Standard No.

T/CNIA 0064-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0064-2020

Scope

This standard specifies the determination method for the content of boron, phosphorus, sodium, magnesium, potassium, calcium, chromium, iron, nickel, copper, and zinc impurities in dust-free wipes used in the polysilicon industry. This standard is applicable to the determination of boron, phosphorus, sodium, magnesium, potassium, calcium, chromium, iron, nickel, copper, and zinc impurity content in dust-free wipes used in the polysilicon industry. The measurement range is 0.10 μg/g ~ 10.00 μg/g. .

T/CNIA 0064-2020 history

• 2020 T/CNIA 0064-2020 Determination of impurity content in dust-free wipes for the polysilicon industry - Inductively coupled plasma atomic emission spectrometry