This standard specifies the secondary ion mass spectrometry test method for magnesium content in gallium nitride materials. This standard is applicable to the quantitative analysis of magnesium content in gallium nitride materials. The measurement range is not less than 5×1014cm-3. Note: The magnesium content in gallium nitride materials is measured in atoms per cubic centimeter.
GB/T 39144-2020 Referenced Document
GB/T 14264 Semiconductor materials-Terms and definitions