NF C96-050-16*NF EN 62047-16:2015
Semiconductor devices - Micro-electromechanical devices - Part 16 : test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods

Standard No.

NF C96-050-16*NF EN 62047-16:2015

Release Date

2015

Published By

Association Francaise de Normalisation

Latest

NF C96-050-16*NF EN 62047-16:2015

NF C96-050-16*NF EN 62047-16:2015 history

• 2015 NF C96-050-16*NF EN 62047-16:2015 Semiconductor devices - Micro-electromechanical devices - Part 16 : test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods