DB53/T 618-2014
Determination of Hydrogenation Tail Gas Component Content in Polysilicon Production by Gas Chromatography (English Version)

Standard No.

DB53/T 618-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

Yunnan Provincial Standard of the People's Republic of China

Latest

DB53/T 618-2014

Scope

This standard specifies the method summary, reagents and materials, instruments and devices, analysis steps, result calculation, precision, and test report for the determination of hydrogenated tail gas component content in polysilicon production by gas chromatography. This standard is applicable to the determination of hydrogen (H2), hydrogen chloride (HCl), dichlorosilane (SiH2Cl2), trichlorosilane (SiHCl3) and silicon tetrachloride (SiCl4) in hydrogenation tail gas.

DB53/T 618-2014 history

• 2014 DB53/T 618-2014 Determination of Hydrogenation Tail Gas Component Content in Polysilicon Production by Gas Chromatography