This standard specifies the technical requirements, inspection rules, test methods, marking, packaging, storage and transportation and safety information of bis(diethylamino)silane. This standard applies to electronic grade finished bis(diethylamino)silane made from industrial grade bis(diethylamino)silane as raw material and purified by distillation, filtration and filtration. This product is mainly used as a precursor to prepare SiO2 films and silicon-based high dielectric films at low temperatures.
T/DLSHXH 008-2022 history
2022T/DLSHXH 008-2022 Electronic special gas bis(diethylamino)silane