DIN 50455-1:2009-10
Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- Standard No.
- DIN 50455-1:2009-10
- Release Date
- 2009
- Published By
- German Institute for Standardization
- Latest
- DIN 50455-1:2009-10
DIN 50455-1:2009-10 history
- 2009 DIN 50455-1:2009-10 Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- 2009 DIN 50455-1:2009 Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- 1991 DIN 50455-1:1991 Testing of materials for semiconductor technology; methods for characterizing photoresists; determination of coating thickness with optical methods
