T/NSSQ 008-2022
Specification for preparation of graphene surface acoustic wave filter structure (English Version)

Standard No.

T/NSSQ 008-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

Group Standards of the People's Republic of China

Latest

T/NSSQ 008-2022

Scope

This document stipulates the terms and definitions for the preparation specifications of graphene surface acoustic wave filter structures and regulates the cleaning of piezoelectric substrates, preparation of metal electrode layers, preparation of deformation components, preparation of graphene layers, etc.

T/NSSQ 008-2022 history

• 2022 T/NSSQ 008-2022 Specification for preparation of graphene surface acoustic wave filter structure