T/ICMTIA ESG0026-2022
Hydrogen chloride gas for integrated circuits (English Version)

Standard No.
T/ICMTIA ESG0026-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/ICMTIA ESG0026-2022
Scope
This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage and safety of hydrogen chloride for integrated circuits. This document applies to hydrogen chloride used in integrated circuit manufacturing processes.

T/ICMTIA ESG0026-2022 history




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