ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
- Standard No.
- ISO 13424:2013
- Release Date
- 2013
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 13424:2013
- Scope
- This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling,peak-shape analysis, and variable photon energy XPS.
ISO 13424:2013 Referenced Document
- ISO 18115-1:2010 Surface chemical analysis - Vocabulary - Part 1: General terms and terms used in spectroscopy
ISO 13424:2013 history
- 2013 ISO 13424:2013 Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
