T/CNIA 0060-2020
Determination of phosphine content in hydrogen for polysilicon by gas chromatography (English Version)

Standard No.

T/CNIA 0060-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0060-2020

Scope

This standard specifies the gas chromatography method for the determination of phosphine content in hydrogen for polycrystalline silicon. This standard is applicable to the determination of phosphine content in hydrogen used for polysilicon. The measurement range is 0.02×10-9 ~ 1×10-5 (v/v).

T/CNIA 0060-2020 history

• 2020 T/CNIA 0060-2020 Determination of phosphine content in hydrogen for polysilicon by gas chromatography