T/ICMTIA ESG0016-2022
Gas disilane for integrated circuits (English Version)

Standard No.
T/ICMTIA ESG0016-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/ICMTIA ESG0016-2022
Scope
This document specifies the technical requirements, detection methods, marking, packaging and transportation, storage and transportation safety requirements for disilane for integrated circuits. This document applies to disilane prepared by the magnesium silicide method (Komatsu method). Mainly used in the vapor deposition process of silicon oxide film, silicon nitride film, polysilicon film, etc. in the semiconductor industry. Other processes shall be carried out with reference to this document.

T/ICMTIA ESG0016-2022 history




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